Inventor
KOEHLE RODERICK
JP14 patents
⚠️ This page may combine multiple inventors who share the name “KOEHLE RODERICK”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
INFINEON TECHNOLOGIES AG
7 patentsUS6993455B2Jan 31, 2006
Method for determining the construction of a mask for the micropatterning of semiconductor substrates by means of photolithography
INFINEON TECHNOLOGIES AG12 citations81
US7328424B2Feb 5, 2008
Method for determining a matrix of transmission cross coefficients in an optical proximity correction of mask layouts
INFINEON TECHNOLOGIES AG5 citations61
US7393614B2Jul 1, 2008
Set of masks including a first mask and a second trimming mask with a semitransparent region having a transparency between 20% and 80% to control diffraction effects and obtain maximum depth of focus for the projection of structure patterns onto a semiconductor wafer
INFINEON TECHNOLOGIES AG3 citations60
US7370313B2May 6, 2008
Method for optimizing a photolithographic mask
INFINEON TECHNOLOGIES AG4 citations60
US7262850B2Aug 28, 2007
Method for inspection of periodic grating structures on lithography masks
INFINEON TECHNOLOGIES AG3 citations59
US7354683B2Apr 8, 2008
Lithography mask for imaging of convex structures
INFINEON TECHNOLOGIES AG0 citations48
US7424144B2Sep 9, 2008
Method for checking periodic structures on lithography masks
INFINEON TECHNOLOGIES AG0 citations38
SONY CORP
5 patentsUS6754158B1Jun 22, 2004
Optical and visual information recording medium, optical and visual information recording apparatus and method
SONY CORP70 citations96
US6259666B1Jul 10, 2001
Optical information recording apparatus, optical information recording method and optical information recording medium
SONY CORP24 citations92
US7319656B2Jan 15, 2008
Optical information recording medium, optical information recording apparatus and method
SONY CORP2 citations62
US7522498B2Apr 21, 2009
Optical information recording apparatus
SONY CORP0 citations52
US9883169B2Jan 30, 2018
Optical system, apparatus and method for operating an apparatus using helmholtz reciprocity
SONY CORP1 citations51