Inventor
VAN DUIJNHOVEN MARTINUS
NL11 patents
⚠️ This page may combine multiple inventors who share the name “VAN DUIJNHOVEN MARTINUS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
9 patentsUS7030958B2Apr 18, 2006
Optical attenuator device, radiation system and lithographic apparatus therewith and device manufacturing method
ASML NETHERLANDS BV31 citations88
US7538273B2May 26, 2009
Cable connection to decrease the passing on of vibrations from a first object to a second object
ASML NETHERLANDS BV8 citations82
US9977349B2May 22, 2018
Support device, lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV2 citations65
US7170582B2Jan 30, 2007
Support device and lightographic apparatus
ASML NETHERLANDS BV2 citations60
US11269262B2Mar 8, 2022
Frame assembly, lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations48
US11169450B2Nov 9, 2021
Pneumatic support device and lithographic apparatus with pneumatic support device
ASML NETHERLANDS BV0 citations48
US10114299B2Oct 30, 2018
Lithographic apparatus
ASML NETHERLANDS BV0 citations46
US10962890B2Mar 30, 2021
Positioning device, lithographic apparatus, method for compensating a balance mass torque and device manufacturing method
ASML NETHERLANDS BV0 citations45
US11762304B2Sep 19, 2023
Lithographic apparatus
ASML NETHERLANDS BV0 citations44
BUTLER HANS
2 patentsUS8743344B2Jun 3, 2014
Cable connection, control system, and method to decrease the passing on of vibrations from a first object to a second object
BUTLER HANS1 citations50
US8493553B2Jul 23, 2013
Lithographic apparatus having a feed forward pressure pulse compensation for the metrology frame
BUTLER HANS0 citations41