P

Inventor

GEERKE JOHAN HENDRIK

NL9 patents
⚠️ This page may combine multiple inventors who share the name “GEERKE JOHAN HENDRIK”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

BUTLER HANS

4 patents
US9378722B2Jun 28, 2016

Lithographic apparatus with actuator to compensate acoustic vibration

BUTLER HANS6 citations70
US8553199B2Oct 8, 2013

Lithographic apparatus and device manufacturing method

BUTLER HANS6 citations70
US8243258B2Aug 14, 2012

Lithographic apparatus having acoustic resonator

BUTLER HANS5 citations60
US8743344B2Jun 3, 2014

Cable connection, control system, and method to decrease the passing on of vibrations from a first object to a second object

BUTLER HANS1 citations50

ASML NETHERLANDS BV

2 patents
US7538273B2May 26, 2009

Cable connection to decrease the passing on of vibrations from a first object to a second object

ASML NETHERLANDS BV8 citations82
US7969550B2Jun 28, 2011

Lithographic apparatus and device manufacturing method

ASML NETHERLANDS BV3 citations60

AARTS IGOR MATHEUS PETRONELLA

1 patent
US8264671B2Sep 11, 2012

Lithographic apparatus and device manufacturing method

AARTS IGOR MATHEUS PETRONELLA5 citations65

SLOTBOOM DAAN MAURTIS

1 patent
US8477289B2Jul 2, 2013

Position measurement using natural frequency vibration of a pattern

SLOTBOOM DAAN MAURTIS2 citations52

HEMPENIUS PETER PAUL

1 patent
US8310651B2Nov 13, 2012

Lithographic apparatus, method and device manufacturing method

HEMPENIUS PETER PAUL1 citations45