Inventor
VERDEYEN JOSEPH T
US12 patents
⚠️ This page may combine multiple inventors who share the name “VERDEYEN JOSEPH T”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
5 patentsUS6861844B1Mar 1, 2005
Electron density measurement and plasma process control system using changes in the resonant frequency of an open resonator containing the plasma
TOKYO ELECTRON LTD22 citations92
US6741944B1May 25, 2004
Electron density measurement and plasma process control system using a microwave oscillator locked to an open resonator containing the plasma
TOKYO ELECTRON LTD28 citations92
US6646386B1Nov 11, 2003
Stabilized oscillator circuit for plasma density measurement
TOKYO ELECTRON LTD22 citations92
US6573731B1Jun 3, 2003
Electron density measurement and control system using plasma-induced changes in the frequency of a microwave oscillator
TOKYO ELECTRON LTD22 citations92
US6799532B2Oct 5, 2004
Stabilized oscillator circuit for plasma density measurement
TOKYO ELECTRON LTD11 citations73
ADVANCED LIGHTING TECH INC
3 patentsUS7126283B2Oct 24, 2006
System and method for generating a discharge in high pressure gases
ADVANCED LIGHTING TECH INC2 citations62
US6791280B2Sep 14, 2004
System and method for generating a discharge in high pressure gases
ADVANCED LIGHTING TECH INC3 citations62
US7281492B2Oct 16, 2007
System and method for generating a discharge in gases
ADVANCED LIGHTING TECH INC0 citations51