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Inventor
DOHTANI KAZUSHIGE
JP
2 patents
⚠️ This page may combine multiple inventors who share the name “DOHTANI KAZUSHIGE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KAWAUE AKIYA
1 patent
US9023581B2
May 5, 2015
Resist composition, method of forming resist pattern, polymeric compound, and compound
KAWAUE AKIYA
8 citations
81
SESHIMO TAKEHIRO
1 patent
US8932795B2
Jan 13, 2015
Resist composition, method of forming resist pattern, novel compound, and acid generator
SESHIMO TAKEHIRO
2 citations
58