P

Inventor

ALLEN ROBERT DAVID

US61 patents
⚠️ This page may combine multiple inventors who share the name “ALLEN ROBERT DAVID”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

IBM

35 patents
US7393624B2Jul 1, 2008

Negative resists based on acid-catalyzed elimination of polar molecules

IBM57 citations98
US5665527ASep 9, 1997

Process for generating negative tone resist images utilizing carbon dioxide critical fluid

IBM138 citations98
US6610456B2Aug 26, 2003

Fluorine-containing styrene acrylate copolymers and use thereof in lithographic photoresist compositions

IBM57 citations96
US6165678ADec 26, 2000

Lithographic photoresist composition and process for its use in the manufacture of integrated circuits

IBM59 citations96
US5985524ANov 16, 1999

Process for using bilayer photoresist

IBM77 citations96
US6806026B2Oct 19, 2004

Photoresist composition

IBM62 citations95
US7141692B2Nov 28, 2006

Molecular photoresists containing nonpolymeric silsesquioxanes

IBM19 citations93
US5962184AOct 5, 1999

Photoresist composition comprising a copolymer of a hydroxystyrene and a (meth)acrylate substituted with an alicyclic ester substituent

IBM48 citations93
US7563558B2Jul 21, 2009

Negative resists based on acid-catalyzed elimination of polar molecules

IBM34 citations92
US7468330B2Dec 23, 2008

Imprint process using polyhedral oligomeric silsesquioxane based imprint materials

IBM23 citations92
US7399581B2Jul 15, 2008

Photoresist topcoat for a photolithographic process

IBM14 citations92
US7300739B2Nov 27, 2007

Negative resists based on a acid-catalyzed elimination of polar molecules

IBM33 citations92
US6177228B1Jan 23, 2001

Photoresist composition and process for its use

IBM35 citations92
US5786131AJul 28, 1998

Process for use of photoresist composition with deep ultraviolet radiation

IBM28 citations92
US8011517B2Sep 6, 2011

Composite membranes with performance enhancing layers

IBM18 citations84
US7358029B2Apr 15, 2008

Low activation energy dissolution modification agents for photoresist applications

IBM9 citations84
US7193023B2Mar 20, 2007

Low activation energy photoresists

IBM11 citations84
US7288362B2Oct 30, 2007

Immersion topcoat materials with improved performance

IBM11 citations83
US7261992B2Aug 28, 2007

Fluorinated silsesquioxane polymers and use thereof in lithographic photoresist compositions

IBM11 citations83
US6180317B1Jan 30, 2001

Composition for photoimaging

IBM16 citations82
US7135595B2Nov 14, 2006

Photoresist composition

IBM4 citations73
US7014980B2Mar 21, 2006

Photoresist composition

IBM10 citations73
USRE38282EOct 21, 2003

Process for using bilayer photoresist

IBM7 citations73
US11814487B2Nov 14, 2023

Feedstock purification of polyester waste for recycling processes

IBM0 citations63
US11795292B2Oct 24, 2023

Media recycling and sanitization

IBM1 citations63
US11787917B2Oct 17, 2023

Recycling process for the recovery of cotton from polyester-cotton fabrics and/or fibers

IBM1 citations63
US8026293B2Sep 27, 2011

Polyhedral oligomeric silsesquioxane based imprint materials and imprint process using polyhedral oligomeric silsesquioxane based imprint materials

IBM4 citations63
US7820369B2Oct 26, 2010

Method for patterning a low activation energy photoresist

IBM3 citations63
US7476492B2Jan 13, 2009

Low activation energy photoresist composition and process for its use

IBM4 citations63
US11367863B2Jun 21, 2022

Porous silicon anode for rechargeable metal halide battery

IBM0 citations62
US8034532B2Oct 11, 2011

High contact angle topcoat material and use thereof in lithography process

IBM4 citations62
US7550254B2Jun 23, 2009

Fluorinated silsesquioxane polymers and use thereof in lithographic photoresist compositions

IBM2 citations62
US6165673ADec 26, 2000

Resist composition with radiation sensitive acid generator

IBM3 citations62
US7855045B2Dec 21, 2010

Immersion topcoat materials with improved performance

IBM2 citations61
US11807725B2Nov 7, 2023

Feedstock engineering of polyester waste for recycling processes

IBM0 citations57

TACLOV LLC

4 patents

SUMITOMO BAKELITE CO

3 patents

GOODRICH CO B F

3 patents

ALLEN ROBERT DAVID

3 patents

MOTOROLA INC

2 patents

Showing the top 50 of 61 patents by PatentIndex Score.