Inventor
CAO MENG
CN14 patents
⚠️ This page may combine multiple inventors who share the name “CAO MENG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KLA TENCOR CORP
5 patentsUS9412673B2Aug 9, 2016
Multi-model metrology
KLA TENCOR CORP10 citations83
US10345721B1Jul 9, 2019
Measurement library optimization in semiconductor metrology
KLA TENCOR CORP11 citations81
US10502692B2Dec 10, 2019
Automated metrology system selection
KLA TENCOR CORP3 citations70
US10190868B2Jan 29, 2019
Metrology system, method, and computer program product employing automatic transitioning between utilizing a library and utilizing regression for measurement processing
KLA TENCOR CORP2 citations66
US10732520B1Aug 4, 2020
Measurement library optimization in semiconductor metrology
KLA TENCOR CORP1 citations59