Inventor
HASUMI KAZUHISA
JP12 patents
⚠️ This page may combine multiple inventors who share the name “HASUMI KAZUHISA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI HIGH TECH CORP
7 patentsUS10724856B2Jul 28, 2020
Image analysis apparatus and charged particle beam apparatus
HITACHI HIGH TECH CORP2 citations70
US10672119B2Jun 2, 2020
Inspection device
HITACHI HIGH TECH CORP1 citations61
US11713963B2Aug 1, 2023
Pattern shape evaluation device, pattern shape evaluation system, and pattern shape evaluation method
HITACHI HIGH TECH CORP0 citations49
US11430106B2Aug 30, 2022
Image processing device, image processing method and charged particle microscope
HITACHI HIGH TECH CORP0 citations49
US10854420B2Dec 1, 2020
Pattern evaluation device
HITACHI HIGH TECH CORP0 citations48
US9831062B2Nov 28, 2017
Method for pattern measurement, method for setting device parameters of charged particle radiation device, and charged particle radiation device
HITACHI HIGH TECH CORP0 citations41
US10295339B2May 21, 2019
Pattern measurement method and measurement apparatus
HITACHI HIGH TECH CORP0 citations40