Inventor
YADAV SANJAY D
US12 patents
Patents
12 patentsUS7951620B2May 31, 2011
Water-barrier encapsulation method
APPLIED MATERIALS INC16 citations88
US12362149B2Jul 15, 2025
Film stress control for plasma enhanced chemical vapor deposition
APPLIED MATERIALS INC1 citations74
US11854771B2Dec 26, 2023
Film stress control for plasma enhanced chemical vapor deposition
APPLIED MATERIALS INC1 citations72
US11094508B2Aug 17, 2021
Film stress control for plasma enhanced chemical vapor deposition
APPLIED MATERIALS INC3 citations72
US10991916B2Apr 27, 2021
Thin-film encapsulation
APPLIED MATERIALS INC2 citations72
US10312475B2Jun 4, 2019
CVD thin film stress control method for display application
APPLIED MATERIALS INC3 citations72
US11770964B2Sep 26, 2023
Thin-film encapsulation
APPLIED MATERIALS INC0 citations62
US7031600B2Apr 18, 2006
Method and apparatus for silicon oxide deposition on large area substrates
APPLIED MATERIALS INC4 citations62
US11053592B2Jul 6, 2021
Substrate temperature monitoring
APPLIED MATERIALS INC1 citations60
US11967516B2Apr 23, 2024
Substrate support for chucking of mask for deposition processes
APPLIED MATERIALS INC0 citations59
US10697063B2Jun 30, 2020
Corner spoiler for improving profile uniformity
APPLIED MATERIALS INC0 citations52
US10751765B2Aug 25, 2020
Remote plasma source cleaning nozzle for cleaning a gas distribution plate
APPLIED MATERIALS INC0 citations41