Inventor
NAITO MICHIYA
JP3 patents
Patents
3 patentsUS11347147B2May 31, 2022
Metal-containing onium salt compound, photodegradable base, resist composition, and method for manufacturing device using said resist composition
TOYO GOSEI CO LTD1 citations59
US11048166B2Jun 29, 2021
Photosensitive compound, photoacid generator and resist composition containing the photosensitive compound, and method for manufacturing device using the resist composition
TOYO GOSEI CO LTD0 citations48
US9850334B2Dec 26, 2017
Manufacturing method of polymer
TOYO GOSEI CO LTD0 citations47