Inventor
KORNILOV KINGA
DE6 patents
Patents
6 patentsUS11237187B2Feb 1, 2022
Method and apparatus for examining a measuring tip of a scanning probe microscope
ZEISS CARL SMT GMBH2 citations71
US10372032B2Aug 6, 2019
Method and device for permanently repairing defects of absent material of a photolithographic mask
ZEISS CARL SMT GMBH2 citations70
US11680963B2Jun 20, 2023
Method and apparatus for examining a measuring tip of a scanning probe microscope
ZEISS CARL SMT GMBH0 citations61
US11977097B2May 7, 2024
Methods and devices for extending a time period until changing a measuring tip of a scanning probe microscope
ZEISS CARL SMT GMBH0 citations59
US11353478B2Jun 7, 2022
Methods and devices for extending a time period until changing a measuring tip of a scanning probe microscope
ZEISS CARL SMT GMBH0 citations59
US10732501B2Aug 4, 2020
Method and device for permanently repairing defects of absent material of a photolithographic mask
ZEISS CARL SMT GMBH0 citations49