Inventor

DESAI DIXIT

US5 patents

⚠️ This page may combine multiple inventors who share the name “DESAI DIXIT”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

DEVINE DANIEL J

2 patents

US8066815B2Nov 29, 2011

Multi-workpiece processing chamber

DEVINE DANIEL J7 citations80

US9184072B2Nov 10, 2015

Advanced multi-workpiece processing chamber

DEVINE DANIEL J16 citations79

BEIJING E TOWN SEMICONDUCTOR TECH CO LTD

2 patents

US12183558B2Dec 31, 2024

Workpiece processing apparatus with thermal processing systems

BEIJING E TOWN SEMICONDUCTOR TECH CO LTD0 citations59

US11837447B2Dec 5, 2023

Workpiece processing apparatus with plasma and thermal processing systems

BEIJING E TOWN SEMICONDUCTOR TECH CO LTD0 citations59

MATTSON TECH INC

1 patent

US7276122B2Oct 2, 2007

Multi-workpiece processing chamber

MATTSON TECH INC25 citations90