Inventor
Hezler Dieter
DE14 patents
⚠️ This page may combine multiple inventors who share the name “Hezler Dieter”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
BEIJING E TOWN SEMICONDUCTOR TECH CO LTD
8 patentsUS12068177B2Aug 20, 2024
Rapid thermal processing system with cooling system
BEIJING E TOWN SEMICONDUCTOR TECH CO LTD2 citations68
US11955315B2Apr 9, 2024
Workpiece processing apparatus with plasma and thermal processing systems
BEIJING E TOWN SEMICONDUCTOR TECH CO LTD2 citations63
US12119216B2Oct 15, 2024
Arc lamp with forming gas for thermal processing systems
BEIJING E TOWN SEMICONDUCTOR TECH CO LTD0 citations61
US12412758B2Sep 9, 2025
Workpiece processing apparatus with thermal processing systems
BEIJING E TOWN SEMICONDUCTOR TECH CO LTD0 citations60
US12183558B2Dec 31, 2024
Workpiece processing apparatus with thermal processing systems
BEIJING E TOWN SEMICONDUCTOR TECH CO LTD0 citations59
US11837447B2Dec 5, 2023
Workpiece processing apparatus with plasma and thermal processing systems
BEIJING E TOWN SEMICONDUCTOR TECH CO LTD0 citations59
US12308209B2May 20, 2025
Workpiece processing apparatus with plasma and thermal processing systems
BEIJING E TOWN SEMICONDUCTOR TECH CO LTD0 citations53
US12362194B2Jul 15, 2025
Rapid thermal processing system with cooling system
BEIJING E TOWN SEMICONDUCTOR TECH CO LTD0 citations47
MATTSON TECH INC
6 patentsUS12046489B2Jul 23, 2024
Workpiece processing apparatus with thermal processing systems
MATTSON TECH INC0 citations61
US11721539B2Aug 8, 2023
Arc lamp with forming gas for thermal processing systems
MATTSON TECH INC0 citations61
US12352306B2Jul 8, 2025
Workpiece support for a thermal processing system
MATTSON TECH INC0 citations59
US10359334B2Jul 23, 2019
Fluid leakage detection for a millisecond anneal system
MATTSON TECH INC1 citations59
US12535273B2Jan 27, 2026
Workpiece processing apparatus with thermal processing systems
MATTSON TECH INC0 citations48
US12442078B2Oct 14, 2025
Workpiece processing apparatus with gas showerhead assembly
MATTSON TECH INC0 citations48