Inventor
MACHESNEY BRIAN J
US11 patents
Patents
11 patentsUS5213655AMay 25, 1993
Device and method for detecting an end point in polishing operation
IBM119 citations98
US5587604ADec 24, 1996
Contacted body silicon-on-insulator field effect transistor
IBM67 citations96
US5521422AMay 28, 1996
Corner protected shallow trench isolation device
IBM89 citations96
US5242524ASep 7, 1993
Device for detecting an end point in polishing operations
IBM74 citations96
US5132617AJul 21, 1992
Method of measuring changes in impedance of a variable impedance load by disposing an impedance connected coil within the air gap of a magnetic core
IBM63 citations96
US4728623AMar 1, 1988
Fabrication method for forming a self-aligned contact window and connection in an epitaxial layer and device structures employing the method
IBM80 citations96
US5466636ANov 14, 1995
Method of forming borderless contacts using a removable mandrel
IBM63 citations95
US4934102AJun 19, 1990
System for mechanical planarization
IBM160 citations94
US4983544AJan 8, 1991
Silicide bridge contact process
IBM103 citations93
US5173439ADec 22, 1992
Forming wide dielectric-filled isolation trenches in semi-conductors
IBM76 citations92
US5741738AApr 21, 1998
Method of making corner protected shallow trench field effect transistor
IBM41 citations90