Inventor
KANG SANG-BUM
KR7 patents
Patents
7 patentsUS6372598B2Apr 16, 2002
Method of forming selective metal layer and method of forming capacitor and filling contact hole using the same
SAMSUNG ELECTRONICS CO LTD283 citations98
US6787460B2Sep 7, 2004
Methods of forming metal layers in integrated circuit devices using selective deposition on edges of recesses and conductive contacts so formed
SAMSUNG ELECTRONICS CO LTD44 citations95
US7067420B2Jun 27, 2006
Methods for forming a metal layer on a semiconductor
SAMSUNG ELECTRONICS CO LTD12 citations84
US7051934B2May 30, 2006
Methods of forming metal layers in integrated circuit devices using selective deposition on edges of recesses
SAMSUNG ELECTRONICS CO LTD15 citations83
US7223689B2May 29, 2007
Methods for forming a metal contact in a semiconductor device in which an ohmic layer is formed while forming a barrier metal layer
SAMSUNG ELECTRONICS CO LTD6 citations73
US6821572B2Nov 23, 2004
Method of cleaning a chemical vapor deposition chamber
SAMSUNG ELECTRONICS CO LTD10 citations73
US6806135B2Oct 19, 2004
Method of manufacturing a semiconductor device using a two-step deposition process
SAMSUNG ELECTRONICS CO LTD5 citations60