Inventor
KIERMASZ ADRIAN
US16 patents
⚠️ This page may combine multiple inventors who share the name “KIERMASZ ADRIAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
METRYX LTD
6 patentsUS9818658B2Nov 14, 2017
Semiconductor wafer processing methods and apparatus
METRYX LTD7 citations83
US8364302B2Jan 29, 2013
Method of controlling semiconductor device fabrication
METRYX LTD7 citations83
US7892863B2Feb 22, 2011
Measuring apparatus
METRYX LTD11 citations83
US8594827B2Nov 26, 2013
Method of controlling semiconductor device fabrication
METRYX LTD2 citations62
US9995783B2Jun 12, 2018
Measurement apparatus and method
METRYX LTD0 citations51
US9903750B2Feb 27, 2018
Method and device for determining information relating to the mass of a semiconductor wafer
METRYX LTD1 citations51
LAM RES CORP
4 patentsUS7459100B2Dec 2, 2008
Methods and apparatus for sequentially alternating among plasma processes in order to optimize a substrate
LAM RES CORP40 citations91
US7018273B1Mar 28, 2006
Platen with diaphragm and method for optimizing wafer polishing
LAM RES CORP13 citations83
US7086936B1Aug 8, 2006
Linear chemical mechanical planarization (CMP) system and method for planarizing a wafer in a single CMP module
LAM RES CORP4 citations62
US6969307B2Nov 29, 2005
Polishing pad conditioning and polishing liquid dispersal system
LAM RES CORP6 citations62