Inventor

VOGTMANN MICHAEL

US7 patents

⚠️ This page may combine multiple inventors who share the name “VOGTMANN MICHAEL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

VOGTMANN MICHAEL

2 patents

US8133093B2Mar 13, 2012

Grinding apparatus having an extendable wheel mount

VOGTMANN MICHAEL6 citations69

US8915771B2Dec 23, 2014

Method and apparatus for cleaning grinding work chuck using a vacuum

VOGTMANN MICHAEL4 citations68

ICHOR SYSTEMS INC

2 patents

US12183597B2Dec 31, 2024

Fluid delivery system

ICHOR SYSTEMS INC1 citations59

US12576373B2Mar 17, 2026

Fluid delivery module

ICHOR SYSTEMS INC0 citations49

WAFER SOLUTIONS INC

1 patent

US6672943B2Jan 6, 2004

Eccentric abrasive wheel for wafer processing

WAFER SOLUTIONS INC67 citations90

LAM RES CORP

1 patent

US6645046B1Nov 11, 2003

Conditioning mechanism in a chemical mechanical polishing apparatus for semiconductor wafers

LAM RES CORP40 citations87

ELECTROGLAS INC

1 patent

US7345466B2Mar 18, 2008

Method and apparatus for cleaning a probe card

ELECTROGLAS INC8 citations67