Inventor
SAKAI JOE
NL4 patents
⚠️ This page may combine multiple inventors who share the name “SAKAI JOE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
3 patentsUS7349069B2Mar 25, 2008
Lithographic apparatus and positioning apparatus
ASML NETHERLANDS BV146 citations96
US7405811B2Jul 29, 2008
Lithographic apparatus and positioning apparatus
ASML NETHERLANDS BV136 citations95
US7507976B2Mar 24, 2009
Lithographic apparatus, beam delivery systems, prisms and device manufacturing method
ASML NETHERLANDS BV1 citations49