Inventor

HATANPAA TIMO

FI14 patents

⚠️ This page may combine multiple inventors who share the name “HATANPAA TIMO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ASM INT NV

7 patents

US10308673B2Jun 4, 2019

Synthesis and use of precursors for ALD of tellurium and selenium thin films

ASM INT NV4 citations84

US9783563B2Oct 10, 2017

Synthesis and use of precursors for ALD of tellurium and selenium thin films

ASM INT NV4 citations84

US11814400B2Nov 14, 2023

Synthesis and use of precursors for ALD of tellurium and selenium thin films

ASM INT NV2 citations73

US11072622B2Jul 27, 2021

Synthesis and use of precursors for ALD of tellurium and selenium thin films

ASM INT NV2 citations73

US10344378B2Jul 9, 2019

Precursors and methods for atomic layer deposition of transition metal oxides

ASM INT NV1 citations72

US9677173B2Jun 13, 2017

Precursors and methods for atomic layer deposition of transition metal oxides

ASM INT NV3 citations72

US11555242B2Jan 17, 2023

Precursors and methods for atomic layer deposition of transition metal oxides

ASM INT NV0 citations62

ASM INT

2 patents

US9365926B2Jun 14, 2016

Precursors and methods for atomic layer deposition of transition metal oxides

ASM INT1 citations62

US7713584B2May 11, 2010

Process for producing oxide films

ASM INT3 citations60

GLEMBOCKI OREST J

1 patent

US9878516B2Jan 30, 2018

Metamaterial thin films

GLEMBOCKI OREST J2 citations65

HATANPAA TIMO

1 patent

US9169557B2Oct 27, 2015

Process for producing oxide films

HATANPAA TIMO4 citations65

ASM IP HOLDING BV

1 patent

US9765431B2Sep 19, 2017

Atomic layer deposition of metal phosphates and lithium silicates

ASM IP HOLDING BV0 citations48

RAHTU ANTTI

1 patent

US8685165B2Apr 1, 2014

Metal oxide films

RAHTU ANTTI1 citations47

HAMALAINEN JANI

1 patent

US9315894B2Apr 19, 2016

Atomic layer deposition of metal phosphates and lithium silicates

HAMALAINEN JANI0 citations42