Inventor

VEHKAMAKI MARKO

FI3 patents

⚠️ This page may combine multiple inventors who share the name “VEHKAMAKI MARKO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

HATANPAA TIMO

1 patent

US9169557B2Oct 27, 2015

Process for producing oxide films

HATANPAA TIMO4 citations65

ASM INT

1 patent

US7713584B2May 11, 2010

Process for producing oxide films

ASM INT3 citations60

RAHTU ANTTI

1 patent

US8685165B2Apr 1, 2014

Metal oxide films

RAHTU ANTTI1 citations47