Inventor
LESKELA MARKKU
FI23 patents
⚠️ This page may combine multiple inventors who share the name “LESKELA MARKKU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASM IP HOLDING BV
6 patentsUS11624112B2Apr 11, 2023
Synthesis and use of precursors for ALD of molybdenum or tungsten containing thin films
ASM IP HOLDING BV1 citations71
US10619242B2Apr 14, 2020
Atomic layer deposition of rhenium containing thin films
ASM IP HOLDING BV4 citations71
US12365981B2Jul 22, 2025
Synthesis and use of precursors for ALD of molybdenum or tungsten containing thin films
ASM IP HOLDING BV0 citations60
US11821084B2Nov 21, 2023
Atomic layer deposition of rhenium containing thin films
ASM IP HOLDING BV0 citations60
US11155917B2Oct 26, 2021
Atomic layer deposition of rhenium containing thin films
ASM IP HOLDING BV0 citations60
US9765431B2Sep 19, 2017
Atomic layer deposition of metal phosphates and lithium silicates
ASM IP HOLDING BV0 citations48
ASM INT NV
4 patentsUS9646820B2May 9, 2017
Methods for forming conductive titanium oxide thin films
ASM INT NV3 citations73
US10344378B2Jul 9, 2019
Precursors and methods for atomic layer deposition of transition metal oxides
ASM INT NV1 citations72
US9677173B2Jun 13, 2017
Precursors and methods for atomic layer deposition of transition metal oxides
ASM INT NV3 citations72
US11555242B2Jan 17, 2023
Precursors and methods for atomic layer deposition of transition metal oxides
ASM INT NV0 citations62