Inventor

CHARLES DELUCA

US2 patents

Patents

2 patents

US7816269B2Oct 19, 2010

Plasma deposition apparatus and method for making polycrystalline silicon

SILICA TECH LLC7 citations68

US7858158B2Dec 28, 2010

Plasma deposition apparatus and method for making polycrystalline silicon

SILICA TECH LLC4 citations57