Inventor
JONES WILLIAM DALE
US7 patents
⚠️ This page may combine multiple inventors who share the name “JONES WILLIAM DALE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
3 patentsUS7163380B2Jan 16, 2007
Control of fluid flow in the processing of an object with a fluid
TOKYO ELECTRON LTD59 citations95
US6986647B2Jan 17, 2006
Pump design for circulating supercritical carbon dioxide
TOKYO ELECTRON LTD27 citations85
US7225820B2Jun 5, 2007
High-pressure processing chamber for a semiconductor wafer
TOKYO ELECTRON LTD13 citations82