Inventor
NAKAZAWA TOSHIKAZU
JP8 patents
⚠️ This page may combine multiple inventors who share the name “NAKAZAWA TOSHIKAZU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CANON ANELVA CORP
6 patentsUS9607868B2Mar 28, 2017
Substrate heat treatment apparatus
CANON ANELVA CORP6 citations71
US10062551B2Aug 28, 2018
Sputtering apparatus and substrate processing apparatus
CANON ANELVA CORP2 citations69
US9997339B2Jun 12, 2018
Sputtering apparatus and substrate processing apparatus
CANON ANELVA CORP2 citations69
US9127355B2Sep 8, 2015
Substrate processing apparatus
CANON ANELVA CORP3 citations58
US10615012B2Apr 7, 2020
Sputtering apparatus and substrate processing apparatus
CANON ANELVA CORP0 citations48
US9822450B2Nov 21, 2017
Substrate processing apparatus
CANON ANELVA CORP1 citations48