Inventor
KOIWA SHINGO
JP7 patents
Patents
7 patentsUS9613837B2Apr 4, 2017
Substrate processing apparatus and maintenance method thereof
TOKYO ELECTRON LTD4 citations71
US10515786B2Dec 24, 2019
Mounting table and plasma processing apparatus
TOKYO ELECTRON LTD2 citations70
US9831112B2Nov 28, 2017
Substrate processing apparatus and substrate detaching method
TOKYO ELECTRON LTD2 citations68
US11521837B2Dec 6, 2022
Stage and substrate processing apparatus
TOKYO ELECTRON LTD0 citations58
US11798791B2Oct 24, 2023
Substrate support and plasma processing apparatus
TOKYO ELECTRON LTD0 citations50
US12451336B2Oct 21, 2025
Substrate processing apparatus and substrate processing method
TOKYO ELECTRON LTD0 citations47
US10665491B2May 26, 2020
Processing apparatus for thermally processing a workpiece in a chamber
TOKYO ELECTRON LTD0 citations37