Inventor
GRIMMINCK LEONARDUS ADRIANUS GERARDUS
NL5 patents
Patents
5 patentsUS9728931B2Aug 8, 2017
Electron injector and free electron laser
ASML NETHERLANDS BV5 citations81
US9823572B2Nov 21, 2017
Lithographic method
ASML NETHERLANDS BV2 citations71
US10580545B2Mar 3, 2020
Beam delivery apparatus and method
ASML NETHERLANDS BV6 citations70
US10103508B2Oct 16, 2018
Electron injector and free electron laser
ASML NETHERLANDS BV0 citations49
US9952513B2Apr 24, 2018
Undulator
ASML NETHERLANDS BV0 citations39