Inventor
GILCHRIST GLEN F R
US10 patents
⚠️ This page may combine multiple inventors who share the name “GILCHRIST GLEN F R”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
5 patentsUS10840132B1Nov 17, 2020
Methods for forming elongated contact hole ends
APPLIED MATERIALS INC6 citations82
US11335590B2May 17, 2022
Methods for forming elongated contact hole ends
APPLIED MATERIALS INC2 citations71
US11842923B2Dec 12, 2023
Methods for forming elongated contact hole ends
APPLIED MATERIALS INC0 citations61
US11361968B2Jun 14, 2022
Atomic layer deposition using a substrate scanning system
APPLIED MATERIALS INC0 citations60
US11881378B2Jan 23, 2024
Angle control for neutral reactive species generated in a plasma
APPLIED MATERIALS INC0 citations53
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC
4 patentsUS9706634B2Jul 11, 2017
Apparatus and techniques to treat substrates using directional plasma and reactive gas
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC12 citations82
US10004133B2Jun 19, 2018
Apparatus and techniques to treat substrates using directional plasma and reactive gas
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC5 citations71
US10730082B2Aug 4, 2020
Apparatus and method for differential in situ cleaning
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC0 citations51
US10193066B2Jan 29, 2019
Apparatus and techniques for anisotropic substrate etching
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC0 citations43