Inventor
KONTOS ALEXANDER
US6 patents
⚠️ This page may combine multiple inventors who share the name “KONTOS ALEXANDER”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC
2 patentsUS9706634B2Jul 11, 2017
Apparatus and techniques to treat substrates using directional plasma and reactive gas
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC12 citations82
US10004133B2Jun 19, 2018
Apparatus and techniques to treat substrates using directional plasma and reactive gas
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC5 citations71