Inventor
GUI CHENG-QUN
NL49 patents
⚠️ This page may combine multiple inventors who share the name “GUI CHENG-QUN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
36 patentsUS6967711B2Nov 22, 2005
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV60 citations96
US6768539B2Jul 27, 2004
Lithographic apparatus
ASML NETHERLANDS BV66 citations94
US7081947B2Jul 25, 2006
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV38 citations93
US9335638B2May 10, 2016
Lithographic apparatus, programmable patterning device and lithographic method
ASML NETHERLANDS BV19 citations92
US7385675B2Jun 10, 2008
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV18 citations92
US7116402B2Oct 3, 2006
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV40 citations92
US6936385B2Aug 30, 2005
Calibration methods, calibration substrates, lithographic apparatus and device manufacturing methods
ASML NETHERLANDS BV37 citations91
US7158208B2Jan 2, 2007
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV31 citations89
US7440081B2Oct 21, 2008
Lithographic apparatus, device manufacturing method, and substrate table
ASML NETHERLANDS BV11 citations84
US7388663B2Jun 17, 2008
Optical position assessment apparatus and method
ASML NETHERLANDS BV16 citations84
US7133118B2Nov 7, 2006
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV12 citations84
US7477403B2Jan 13, 2009
Optical position assessment apparatus and method
ASML NETHERLANDS BV8 citations82
US7561251B2Jul 14, 2009
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV10 citations79
US7084955B2Aug 1, 2006
Lithographic apparatus
ASML NETHERLANDS BV11 citations77
US7251020B2Jul 31, 2007
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV7 citations74
US7202939B2Apr 10, 2007
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV9 citations74
US7064807B2Jun 20, 2006
Lithographic apparatus
ASML NETHERLANDS BV10 citations74
US7576834B2Aug 18, 2009
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV7 citations73
US7468291B2Dec 23, 2008
Method and apparatus for locating and/or forming bumps
ASML NETHERLANDS BV7 citations67
US7522266B2Apr 21, 2009
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV2 citations63
US7333177B2Feb 19, 2008
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV5 citations63
US7324186B2Jan 29, 2008
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV3 citations63
US8675175B2Mar 18, 2014
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV1 citations62
US7190434B2Mar 13, 2007
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV5 citations62
US6914664B2Jul 5, 2005
Lithographic apparatus, alignment method and device manufacturing method
ASML NETHERLANDS BV5 citations61
US7609362B2Oct 27, 2009
Scanning lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV2 citations60
US7253884B2Aug 7, 2007
Method of calibrating a lithographic apparatus, alignment method, computer program, data storage medium, lithographic apparatus, and device manufacturing method
ASML NETHERLANDS BV5 citations59
US8029973B2Oct 4, 2011
Lithographic method and carrier substrate
ASML NETHERLANDS BV2 citations58
US7879514B2Feb 1, 2011
Lithographic method and patterning device
ASML NETHERLANDS BV3 citations57
USRE45284EDec 9, 2014
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations52
US7911586B2Mar 22, 2011
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations52
US7428040B2Sep 23, 2008
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations51
US7193231B2Mar 20, 2007
Alignment tool, a lithographic apparatus, an alignment method, a device manufacturing method and device manufactured thereby
ASML NETHERLANDS BV1 citations51
US7684009B2Mar 23, 2010
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations49
US8383325B2Feb 26, 2013
Lithographic apparatus and method
ASML NETHERLANDS BV0 citations48
US7567340B2Jul 28, 2009
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations36
ASML HOLDING NV
5 patentsUS7158215B2Jan 2, 2007
Large field of view protection optical system with aberration correctability for flat panel displays
ASML HOLDING NV27 citations89
US7184124B2Feb 27, 2007
Lithographic apparatus having an adjustable projection system and device manufacturing method
ASML HOLDING NV13 citations82
US7643128B2Jan 5, 2010
Large field of view projection optical system with aberration correctability
ASML HOLDING NV6 citations73
US7405802B2Jul 29, 2008
Large field of view 2X magnification projection optical system for FPD manufacture
ASML HOLDING NV1 citations56
US7426076B2Sep 16, 2008
Projection system for a lithographic apparatus
ASML HOLDING NV0 citations40