Inventor
LOBO ARUN
IN3 patents
Patents
3 patentsUS10359706B1Jul 23, 2019
Integrated scanning electron microscopy and optical analysis techniques for advanced process control
KLA TENCOR CORP7 citations76
US10204416B2Feb 12, 2019
Automatic deskew using design files or inspection images
KLA TENCOR CORP1 citations54
US9947596B2Apr 17, 2018
Range-based real-time scanning electron microscope non-visual binner
KLA TENCOR CORP0 citations42