Inventor
KABANSKY ALEXANDER
US8 patents
Patents
8 patentsUS9805941B2Oct 31, 2017
Integrating atomic scale processes: ALD (atomic layer deposition) and ALE (atomic layer etch)
LAM RES CORP44 citations97
US9576811B2Feb 21, 2017
Integrating atomic scale processes: ALD (atomic layer deposition) and ALE (atomic layer etch)
LAM RES CORP65 citations97
US10186426B2Jan 22, 2019
Integrating atomic scale processes: ALD (atomic layer deposition) and ale (atomic layer etch)
LAM RES CORP16 citations94
US10515816B2Dec 24, 2019
Integrating atomic scale processes: ALD (atomic layer deposition) and ALE (atomic layer etch)
LAM RES CORP6 citations84
US10825680B2Nov 3, 2020
Directional deposition on patterned structures
LAM RES CORP3 citations73
US12027375B2Jul 2, 2024
Selective etch using a sacrificial mask
LAM RES CORP1 citations60
US12550646B2Feb 10, 2026
Selectively etching for nanowires
LAM RES CORP0 citations51
US11521860B2Dec 6, 2022
Selectively etching for nanowires
LAM RES CORP0 citations48