Inventor
NGUYEN JOHN VU
US5 patents
Patents
5 patentsUS10857647B2Dec 8, 2020
High-rate CMP polishing method
ROHM & HAAS ELECT MATERIALS CMP HOLDINGS INC0 citations36
US10861702B2Dec 8, 2020
Controlled residence CMP polishing method
ROHM & HAAS ELECT MATERIALS CMP HOLDINGS INC0 citations36
US10857648B2Dec 8, 2020
Trapezoidal CMP groove pattern
ROHM & HAAS ELECT MATERIALS CMP HOLDINGS INC0 citations36
US10777418B2Sep 15, 2020
Biased pulse CMP groove pattern
ROHM & HAAS ELECT MATERIALS CMP HOLDINGS INC0 citations36
US10586708B2Mar 10, 2020
Uniform CMP polishing method
ROHM & HAAS ELECT MATERIALS CMP HOLDINGS INC0 citations36