Inventor
STACK JEFFREY ROBERT
US6 patents
Patents
6 patentsUS9802293B1Oct 31, 2017
Method to shape the surface of chemical mechanical polishing pads
ROHM & HAAS ELECT MATERIALS CMP HOLDINGS INC2 citations68
US10857647B2Dec 8, 2020
High-rate CMP polishing method
ROHM & HAAS ELECT MATERIALS CMP HOLDINGS INC0 citations36
US10861702B2Dec 8, 2020
Controlled residence CMP polishing method
ROHM & HAAS ELECT MATERIALS CMP HOLDINGS INC0 citations36
US10857648B2Dec 8, 2020
Trapezoidal CMP groove pattern
ROHM & HAAS ELECT MATERIALS CMP HOLDINGS INC0 citations36
US10777418B2Sep 15, 2020
Biased pulse CMP groove pattern
ROHM & HAAS ELECT MATERIALS CMP HOLDINGS INC0 citations36
US10586708B2Mar 10, 2020
Uniform CMP polishing method
ROHM & HAAS ELECT MATERIALS CMP HOLDINGS INC0 citations36