P

Inventor

SUGITA KENICHI

JP7 patents
⚠️ This page may combine multiple inventors who share the name “SUGITA KENICHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

EBARA CORP

3 patents
US10008380B2Jun 26, 2018

Substrate drying apparatus, substrate drying method and control program

EBARA CORP7 citations83
US8769842B2Jul 8, 2014

Substrate drying apparatus, substrate drying method and control program

EBARA CORP5 citations72
US7938130B2May 10, 2011

Substrate holding rotating mechanism, and substrate processing apparatus

EBARA CORP3 citations62

KANEKO HIROYUKI

1 patent
US8087419B2Jan 3, 2012

Substrate holding rotating mechanism, and substrate processing apparatus

KANEKO HIROYUKI5 citations72

HITACHI INFORMATION & TELECOMMUNICATION ENG LTD

1 patent
US12372997B2Jul 29, 2025

Processing device and error detection method

HITACHI INFORMATION & TELECOMMUNICATION ENG LTD0 citations56

TOSHIBA KK

1 patent
US10629717B2Apr 21, 2020

High power device

TOSHIBA KK0 citations48

SHIONOGI & CO

1 patent
US6143732ANov 7, 2000

Sesquiterpene derivatives

SHIONOGI & CO1 citations47