Inventor
BIHR ULRICH
DE9 patents
⚠️ This page may combine multiple inventors who share the name “BIHR ULRICH”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ZEISS CARL SMT GMBH
5 patentsUS10261424B2Apr 16, 2019
Lithography apparatus and method for operating a lithography apparatus
ZEISS CARL SMT GMBH2 citations71
US10838307B2Nov 17, 2020
Apparatus and method for operating an apparatus
ZEISS CARL SMT GMBH2 citations70
US10139618B2Nov 27, 2018
Multi-mirror array
ZEISS CARL SMT GMBH3 citations63
US11262660B2Mar 1, 2022
Image sensor, position sensor device, lithography system, and method for operating an image sensor
ZEISS CARL SMT GMBH0 citations47
US10514619B2Dec 24, 2019
Sensor arrangement for a lithography system, lithography system, and method for operating a lithography system
ZEISS CARL SMT GMBH0 citations39
CARL ZEISS MULTISEM GMBH
4 patentsUS10854423B2Dec 1, 2020
Multi-beam particle beam system
CARL ZEISS MULTISEM GMBH31 citations92
US11239054B2Feb 1, 2022
Multi-beam particle beam system
CARL ZEISS MULTISEM GMBH0 citations60
US12255040B2Mar 18, 2025
Multi-beam particle beam system and method for operating same
CARL ZEISS MULTISEM GMBH0 citations48
US12586749B2Mar 24, 2026
Certain improvements of multi-beam generating and multi-beam deflecting units
CARL ZEISS MULTISEM GMBH0 citations47