Inventor
IWANAGA SHUJI
JP18 patents
⚠️ This page may combine multiple inventors who share the name “IWANAGA SHUJI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
14 patentsUS10818004B2Oct 27, 2020
Substrate defect inspection apparatus, substrate defect inspection method, and storage medium
TOKYO ELECTRON LTD5 citations83
US9355442B2May 31, 2016
Film thickness measurement apparatus, film thickness measurement method, and non-transitory computer storage medium
TOKYO ELECTRON LTD12 citations79
US8014895B2Sep 6, 2011
Temperature setting method of heat processing plate, temperature setting apparatus of heat processing plate, program, and computer-readable recording medium recording program thereon
TOKYO ELECTRON LTD6 citations73
US9097681B2Aug 4, 2015
Inspection device, bonding system and inspection method
TOKYO ELECTRON LTD4 citations69
US12243213B2Mar 4, 2025
Substrate inspection device, substrate inspection system, and substrate inspection method
TOKYO ELECTRON LTD1 citations63
US9039863B2May 26, 2015
Substrate processing apparatus, substrate processing method, and computer readable storage medium storing substrate processing program
TOKYO ELECTRON LTD2 citations62
US7815366B2Oct 19, 2010
Method of detecting extraneous matter on heat processing plate, heat processing apparatus, program, and computer-readable recording medium with program recorded thereon
TOKYO ELECTRON LTD6 citations62
US11636585B2Apr 25, 2023
Substrate defect inspection apparatus, substrate defect inspection method, and storage medium
TOKYO ELECTRON LTD0 citations61
US11227381B2Jan 18, 2022
Substrate defect inspection apparatus, substrate defect inspection method, and storage medium
TOKYO ELECTRON LTD1 citations61
US8379965B2Feb 19, 2013
Defect classification method, computer storage medium, and defect classification apparatus
TOKYO ELECTRON LTD3 citations61
US9146479B2Sep 29, 2015
Substrate reference image creation method, substrate defect inspection method, substrate reference image creation apparatus, substrate defect inspection unit and non-transitory computer storage medium
TOKYO ELECTRON LTD1 citations52
US8989477B2Mar 24, 2015
Process monitoring device and process monitoring method in semiconductor manufacturing apparatus and semiconductor manufacturing apparatus
TOKYO ELECTRON LTD1 citations49
US9342880B2May 17, 2016
Defect analyzing apparatus, substrate processing system, defect analyzing method and computer-readable storage medium
TOKYO ELECTRON LTD0 citations41
US9229337B2Jan 5, 2016
Setting method of exposure apparatus, substrate imaging apparatus and non-transitory computer-readable storage medium
TOKYO ELECTRON LTD0 citations40
IWANAGA SHUJI
4 patentsUS8874254B2Oct 28, 2014
Temperature setting method of heat processing plate, temperature setting apparatus of heat processing plate, program, and computer-readable recording medium recording program thereon
IWANAGA SHUJI2 citations60
US8212869B2Jul 3, 2012
Substrate inspection method, substrate inspection system and storage medium
IWANAGA SHUJI2 citations59
US8873849B2Oct 28, 2014
Image processing method, image display method, image processing apparatus and a non-transitory computer-readable recording medium
IWANAGA SHUJI3 citations58
US8311316B2Nov 13, 2012
Defect inspecting method, defect inspecting apparatus, and storage medium storing defect inspection program
IWANAGA SHUJI0 citations39