Inventor
HENCK STEVEN A
US13 patents
⚠️ This page may combine multiple inventors who share the name “HENCK STEVEN A”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TEXAS INSTRUMENTS INC
11 patentsUS5512374AApr 30, 1996
PFPE coatings for micro-mechanical devices
TEXAS INSTRUMENTS INC163 citations99
US6624944B1Sep 23, 2003
Fluorinated coating for an optical element
TEXAS INSTRUMENTS INC141 citations98
US6072617AJun 6, 2000
Micro mechanical device with memory metal component
TEXAS INSTRUMENTS INC65 citations95
US5576878ANov 19, 1996
Use of incompatible materials to eliminate sticking of micro-mechanical devices
TEXAS INSTRUMENTS INC66 citations95
US5503707AApr 2, 1996
Method and apparatus for process endpoint prediction based on actual thickness measurements
TEXAS INSTRUMENTS INC124 citations94
US5501637AMar 26, 1996
Temperature sensor and method
TEXAS INSTRUMENTS INC72 citations94
US6140243AOct 31, 2000
Low temperature process for post-etch defluoridation of metals
TEXAS INSTRUMENTS INC39 citations91
US5620556AApr 15, 1997
Method for rapidly etching material on a semiconductor device
TEXAS INSTRUMENTS INC16 citations81
US5249865AOct 5, 1993
Interferometric temperature measurement system and method
TEXAS INSTRUMENTS INC18 citations74
US5604625AFeb 18, 1997
Micromechanical device manufactured out of incompatible materials
TEXAS INSTRUMENTS INC10 citations73
US5425839AJun 20, 1995
Method for rapidly etching material on a semiconductor device
TEXAS INSTRUMENTS INC8 citations73