Inventor

MACLEISH JOSEPH H

US5 patents

⚠️ This page may combine multiple inventors who share the name “MACLEISH JOSEPH H”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

MATTSON TECH INC

2 patents

US5968279AOct 19, 1999

Method of cleaning wafer substrates

MATTSON TECH INC108 citations96

US6118100ASep 12, 2000

Susceptor hold-down mechanism

MATTSON TECH INC43 citations89

(unassigned)

2 patents

US5891251AApr 6, 1999

CVD reactor having heated process chamber within isolation chamber

443 citations96

US5653808AAug 5, 1997

Gas injection system for CVD reactors

89 citations93

CONCEPT SYSTEMS DESIGN INC

1 patent

US6113984ASep 5, 2000

Gas injection system for CVD reactors

CONCEPT SYSTEMS DESIGN INC86 citations93