Inventor
LI SHIH-HUNG
US8 patents
Patents
8 patentsUS6620670B2Sep 16, 2003
Process conditions and precursors for atomic layer deposition (ALD) of AL2O3
APPLIED MATERIALS INC217 citations98
US6773507B2Aug 10, 2004
Apparatus and method for fast-cycle atomic layer deposition
APPLIED MATERIALS INC124 citations97
US6063196AMay 16, 2000
Semiconductor processing chamber calibration tool
APPLIED MATERIALS INC406 citations97
US6274878B1Aug 14, 2001
Wafer out-of-pocket detection method
APPLIED MATERIALS INC590 citations96
US6251759B1Jun 26, 2001
Method and apparatus for depositing material upon a semiconductor wafer using a transition chamber of a multiple chamber semiconductor wafer processing system
APPLIED MATERIALS INC88 citations96
US6596085B1Jul 22, 2003
Methods and apparatus for improved vaporization of deposition material in a substrate processing system
APPLIED MATERIALS INC71 citations95
US6197117B1Mar 6, 2001
Wafer out-of-pocket detector and susceptor leveling tool
APPLIED MATERIALS INC58 citations94
US6099596AAug 8, 2000
Wafer out-of-pocket detection tool
APPLIED MATERIALS INC56 citations94