Inventor

VASS CURTIS

US3 patents

Patents

3 patents

US6274878B1Aug 14, 2001

Wafer out-of-pocket detection method

APPLIED MATERIALS INC590 citations96

US6197117B1Mar 6, 2001

Wafer out-of-pocket detector and susceptor leveling tool

APPLIED MATERIALS INC58 citations94

US6099596AAug 8, 2000

Wafer out-of-pocket detection tool

APPLIED MATERIALS INC56 citations94