Inventor
NISHIMUKO KOKI
JP5 patents
⚠️ This page may combine multiple inventors who share the name “NISHIMUKO KOKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
4 patentsUS7780366B2Aug 24, 2010
Resist pattern forming method
TOKYO ELECTRON LTD22 citations92
US7488127B2Feb 10, 2009
Resist pattern forming apparatus and method thereof
TOKYO ELECTRON LTD16 citations92
US6984477B2Jan 10, 2006
Resist pattern forming apparatus and method thereof
TOKYO ELECTRON LTD25 citations92
US6281962B1Aug 28, 2001
Processing apparatus for coating substrate with resist and developing exposed resist including inspection equipment for inspecting substrate and processing method thereof
TOKYO ELECTRON LTD52 citations91