Inventor
RATHI SUDHA
US28 patents
⚠️ This page may combine multiple inventors who share the name “RATHI SUDHA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
17 patentsUS6355571B1Mar 12, 2002
Method and apparatus for reducing copper oxidation and contamination in a semiconductor device
APPLIED MATERIALS INC98 citations99
US8361906B2Jan 29, 2013
Ultra high selectivity ashable hard mask film
APPLIED MATERIALS INC63 citations96
US8993454B2Mar 31, 2015
Ultra high selectivity doped amorphous carbon strippable hardmask development and integration
APPLIED MATERIALS INC16 citations92
US6946401B2Sep 20, 2005
Plasma treatment for copper oxide reduction
APPLIED MATERIALS INC28 citations92
US6734102B2May 11, 2004
Plasma treatment for copper oxide reduction
APPLIED MATERIALS INC39 citations92
US6853043B2Feb 8, 2005
Nitrogen-free antireflective coating for use with photolithographic patterning
APPLIED MATERIALS INC41 citations91
US6927178B2Aug 9, 2005
Nitrogen-free dielectric anti-reflective coating and hardmask
APPLIED MATERIALS INC32 citations90
US6541369B2Apr 1, 2003
Method and apparatus for reducing fixed charges in a semiconductor device
APPLIED MATERIALS INC24 citations88
US7867578B2Jan 11, 2011
Method for depositing an amorphous carbon film with improved density and step coverage
APPLIED MATERIALS INC12 citations84
US9390910B2Jul 12, 2016
Gas flow profile modulated control of overlay in plasma CVD films
APPLIED MATERIALS INC5 citations83
US6700202B2Mar 2, 2004
Semiconductor device having reduced oxidation interface
APPLIED MATERIALS INC8 citations74
US7105460B2Sep 12, 2006
Nitrogen-free dielectric anti-reflective coating and hardmask
APPLIED MATERIALS INC8 citations73
US10373822B2Aug 6, 2019
Gas flow profile modulated control of overlay in plasma CVD films
APPLIED MATERIALS INC2 citations72
US7514125B2Apr 7, 2009
Methods to improve the in-film defectivity of PECVD amorphous carbon films
APPLIED MATERIALS INC2 citations63
US9837265B2Dec 5, 2017
Gas flow profile modulated control of overlay in plasma CVD films
APPLIED MATERIALS INC1 citations62
US7776516B2Aug 17, 2010
Graded ARC for high NA and immersion lithography
APPLIED MATERIALS INC4 citations61
US10510518B2Dec 17, 2019
Methods of dry stripping boron-carbon films
APPLIED MATERIALS INC0 citations51
LEE KWANGDUK DOUGLAS
3 patentsUS9299581B2Mar 29, 2016
Methods of dry stripping boron-carbon films
LEE KWANGDUK DOUGLAS8 citations82
US8105465B2Jan 31, 2012
Method for depositing conformal amorphous carbon film by plasma-enhanced chemical vapor deposition (PECVD)
LEE KWANGDUK DOUGLAS3 citations59
US9653327B2May 16, 2017
Methods of removing a material layer from a substrate using water vapor treatment
LEE KWANGDUK DOUGLAS1 citations49