Inventor · disambiguated record

Bernd Schönherr

Also filed as: SCHOENHERR BERND

1 granted patent·2 citations·filing 2003–2003

19Inventor score

Technology areasH01J

Files withINFINEON TECHNOLOGIES AG1

Top patents by PatentIndex Score

1 record

0145US6953644B2Method for compensating for scatter/reflection effects in particle beam lithographyINFINEON TECHNOLOGIES AG·Filed 2003·Granted Oct 11, 2005·2 cites·11 claims

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