Inventor
ENKISCH BIRGIT
DE8 patents
Patents
8 patentsUS7145720B2Dec 5, 2006
Objective with fluoride crystal lenses
ZEISS CARL SMT AG49 citations95
US7411656B2Aug 12, 2008
Optically polarizing retardation arrangement, and a microlithography projection exposure machine
ZEISS CARL SMT AG20 citations92
US7053988B2May 30, 2006
Optically polarizing retardation arrangement, and microlithography projection exposure machine
ZEISS CARL SMT AG20 citations92
US7180667B2Feb 20, 2007
Objective with fluoride crystal lenses
ZEISS CARL SMT AG4 citations73
US7672044B2Mar 2, 2010
Lens made of a crystalline material
ZEISS CARL SMT AG3 citations62
US7126765B2Oct 24, 2006
Objective with fluoride crystal lenses
ZEISS CARL SMT AG3 citations62
US7382536B2Jun 3, 2008
Objective with fluoride crystal lenses
ZEISS CARL SMT AG0 citations51
US7292388B2Nov 6, 2007
Lens made of a crystalline material
ZEISS CARL SMT AG0 citations51