Inventor
HEISLER ANDREAS
DE5 patents
Patents
5 patentsUS6836530B2Dec 28, 2004
Illumination system with a plurality of individual gratings
ZEISS CARL SMT AG16 citations82
US7354168B2Apr 8, 2008
Facet mirror having a number of mirror facets
ZEISS CARL SMT AG17 citations81
US7090362B2Aug 15, 2006
Facet mirror having a number of mirror facets
ZEISS CARL SMT AG9 citations72
US7802891B2Sep 28, 2010
Faceted mirror apparatus
ZEISS CARL SMT AG2 citations60
US7246909B2Jul 24, 2007
Method for the production of a facetted mirror
ZEISS CARL SMT AG4 citations60