Inventor

YANG KEN L

US2 patents

Patents

2 patents

US7442589B2Oct 28, 2008

System and method for uniform multi-plane silicon oxide layer formation for optical applications

HONEYWELL INT INC3 citations59

US7482192B2Jan 27, 2009

Method of making dimple structure for prevention of MEMS device stiction

HONEYWELL INT INC5 citations57