Inventor

TOKRANOVA NATALYA

US2 patents

Patents

2 patents

US7527997B2May 5, 2009

MEMS structure with anodically bonded silicon-on-insulator substrate

UNIV NEW YORK STATE RES FOUND9 citations79

US9812591B2Nov 7, 2017

Self-balancing position sensitive detector

UNIV NEW YORK STATE RES FOUND0 citations41