Inventor
HOEBERICHTS EDUARD
BE3 patents
Patents
3 patentsUS7158208B2Jan 2, 2007
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV31 citations89
US7609362B2Oct 27, 2009
Scanning lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV2 citations60
US7684009B2Mar 23, 2010
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations49