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Inventor
XU DAJIANG
US
3 patents
⚠️ This page may combine multiple inventors who share the name “XU DAJIANG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
2 patents
US7910218B2
Mar 22, 2011
Cleaning and refurbishing chamber components having metal coatings
APPLIED MATERIALS INC
25 citations
90
US7579067B2
Aug 25, 2009
Process chamber component with layered coating and method
APPLIED MATERIALS INC
18 citations
90
CHARTERED SEMICONDUCTOR MFG
1 patent
US5858847A
Jan 12, 1999
Method for a lightly doped drain structure
CHARTERED SEMICONDUCTOR MFG
44 citations
91