Inventor
HACHISUKA ATSUSHI
JP42 patents
⚠️ This page may combine multiple inventors who share the name “HACHISUKA ATSUSHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MITSUBISHI ELECTRIC CORP
36 patentsUS6323560B1Nov 27, 2001
Registration accuracy measurement mark, method of repairing defect of the mark, photomask having the mark, method of manufacturing the photo mask and method of exposure thereof
MITSUBISHI ELECTRIC CORP63 citations95
US5798289AAug 25, 1998
Method of manufacturing stacked capacitors in a DRAM with reduced isolation region between adjacent capacitors
MITSUBISHI ELECTRIC CORP20 citations93
US5597755AJan 28, 1997
Method of manufacturing a stacked capacitor in a dram
MITSUBISHI ELECTRIC CORP25 citations93
US5381365AJan 10, 1995
Dynamic random access memory having stacked type capacitor and manufacturing method therefor
MITSUBISHI ELECTRIC CORP33 citations93
US5364811ANov 15, 1994
Method of manufacturing a semiconductor memory device with multiple device forming regions
MITSUBISHI ELECTRIC CORP26 citations93
US5240872AAug 31, 1993
Method of manufacturing semiconductor device having interconnection layer contacting source/drain regions
MITSUBISHI ELECTRIC CORP29 citations93
US5218219AJun 8, 1993
Semiconductor memory device having a peripheral wall at the boundary region of a memory cell array region and a peripheral circuit region
MITSUBISHI ELECTRIC CORP35 citations93
US5173752ADec 22, 1992
Semiconductor device having interconnection layer contacting source/drain regions
MITSUBISHI ELECTRIC CORP22 citations93
US6388295B1May 14, 2002
Semiconductor device and method of manufacturing the same
MITSUBISHI ELECTRIC CORP21 citations92
US6163062ADec 19, 2000
Semiconductor device having a metallic fuse member and cutting method thereof with laser light
MITSUBISHI ELECTRIC CORP23 citations92
US5672533ASep 30, 1997
Field effect transistor having impurity regions of different depths and manufacturing method thereof
MITSUBISHI ELECTRIC CORP37 citations92
US5580813ADec 3, 1996
Method of forming a semiconductor memory device having a contact region between memory cell and an interlayer insolating layer
MITSUBISHI ELECTRIC CORP20 citations92
US5578861ANov 26, 1996
Semiconductor device having redundant circuit
MITSUBISHI ELECTRIC CORP27 citations92
US5489791AFeb 6, 1996
Field effect transistor having impurity regions of different depths and manufacturing method thereof
MITSUBISHI ELECTRIC CORP22 citations92
US5448512ASep 5, 1995
Semiconductor memory device with contact region intermediate memory cell and peripheral circuit
MITSUBISHI ELECTRIC CORP26 citations92
US6218235B1Apr 17, 2001
Method of manufacturing a DRAM and logic device
MITSUBISHI ELECTRIC CORP31 citations90
US6486516B1Nov 26, 2002
Semiconductor device and a method of producing the same
MITSUBISHI ELECTRIC CORP17 citations84
US5434439AJul 18, 1995
Dynamic random access memory having stacked type capacitor and manufacturing method therefor
MITSUBISHI ELECTRIC CORP18 citations82
US5276344AJan 4, 1994
Field effect transistor having impurity regions of different depths and manufacturing method thereof
MITSUBISHI ELECTRIC CORP17 citations82
US5892291AApr 6, 1999
Registration accuracy measurement mark
MITSUBISHI ELECTRIC CORP15 citations81
US6160284ADec 12, 2000
Semiconductor device with sidewall insulating layers in the capacitor contact hole
MITSUBISHI ELECTRIC CORP15 citations74
US5892702AApr 6, 1999
Semiconductor memory device and method of manufacturing the same
MITSUBISHI ELECTRIC CORP8 citations74
US5627093AMay 6, 1997
Method of manufacturing a wiring layer for use in a semiconductor device having a plurality of conductive layers
MITSUBISHI ELECTRIC CORP11 citations74
US5502324AMar 26, 1996
Composite wiring layer
MITSUBISHI ELECTRIC CORP5 citations74
US5408114AApr 18, 1995
Semiconductor memory device having cylindrical capacitor and manufacturing method thereof
MITSUBISHI ELECTRIC CORP12 citations74
US5338699AAug 16, 1994
Method of making a semiconductor integrated device having gate sidewall structure
MITSUBISHI ELECTRIC CORP8 citations74
US5233212AAug 3, 1993
Semiconductor device having gate electrode spacing dependent upon gate side wall insulating dimension
MITSUBISHI ELECTRIC CORP9 citations74
US6331462B1Dec 18, 2001
Manufacturing method of a semiconductor device for desired circuit patterns
MITSUBISHI ELECTRIC CORP10 citations73
US6068952AMay 30, 2000
Registration accuracy measurement mark, method of repairing defect of the mark, photomask having the mark, method of manufacturing the photomask and method of exposure thereof
MITSUBISHI ELECTRIC CORP4 citations73
US5153689AOct 6, 1992
Semiconductor memory device having bit lines formed of an interconnecting layer of lower reflectance material than the material of the word lines
MITSUBISHI ELECTRIC CORP14 citations73
US5300444AApr 5, 1994
Method of manufacturing a semiconductor device having a stacked structure formed of polycrystalline silicon film and silicon oxide film
MITSUBISHI ELECTRIC CORP9 citations71
US6309931B1Oct 30, 2001
Method of making a semiconductor device with sidewall insulating layers in the capacitor contact hole
MITSUBISHI ELECTRIC CORP2 citations63
US5506164AApr 9, 1996
Method of manufacturing a semiconductor device having a cylindrical capacitor
MITSUBISHI ELECTRIC CORP5 citations63
US5281838AJan 25, 1994
Semiconductor device having contact between wiring layer and impurity region
MITSUBISHI ELECTRIC CORP6 citations63
US7145240B2Dec 5, 2006
Semiconductor device having a capacitor and method of manufacturing the same
MITSUBISHI ELECTRIC CORP3 citations62
US6313032B1Nov 6, 2001
Method for manufacturing a salicide transistor, semiconductor storage, and semiconductor device
MITSUBISHI ELECTRIC CORP1 citations52
RENESAS TECH CORP
4 patentsUS6784066B2Aug 31, 2004
Method for manufacturing semiconductor device and semiconductor device manufactured thereby
RENESAS TECH CORP10 citations74
US6798006B2Sep 28, 2004
Semiconductor device and manufacturing method thereof
RENESAS TECH CORP9 citations73
US7563668B2Jul 21, 2009
Semiconductor device and method of manufacturing same
RENESAS TECH CORP2 citations62
US6765251B2Jul 20, 2004
Semiconductor device having interconnection structure
RENESAS TECH CORP0 citations41